FLEXion ion implanters for III-V applications

The 3rd and 4th FLEXion series ion implanters have been delivered to a major semiconductor manufacturer in Germany and to the Semi-Conductor Laboratory in India. These production tools are fitted with the latest hardware and software enhancements to optimize ion implantation of III-V substrates. The III-V configuration is the second type of FLEXion series production ion implanters available in addition to the SiC […]